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Course Criteria
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3.00 Credits
This course covers all aspects of lithography from design and mask fabrication to pattern transfer and inspection. The course is divided into three major sections. The first section describes the lithographic process from substrate preparation to exposure. The second section examines the processes from development through inspection (both before and after pattern transfer). This section introduces optical masks, aligners, steppers and scanners. In addition, critical dimension (CD) and profile control of photoresists are investigated. The last section discusses advances in optical lithographic techniques such as phase shifting masks and illumination schemes as well as molecular ruler, e-beam, x-ray, EUV, and ion beam lithography.
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3.00 Credits
This course covers in detail the processing steps used in modifying material properties in nanofabrication. Included are chemical reaction, growth and annealing processes. The impact of thermal processing and thermal processing on defects, gettering, and impurities and overall electrical, mechanical, optical, and chemical properties are studied. The student grows and measures gate and field oxides, implants and activates source and drain regions, and evaluates thermal budget requirements using state-of-the-art tools. Included also are other modification technologies such as ion implantation, diffusion and chemical surface preparation and treatment. Substrate preparation processing such as slicing, etching, polishing and epitaxial growth are also covered.
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3.00 Credits
This course examines a variety of measurements and techniques essential for controlling micro- and nanofabrication processes. Monitoring techniques such as residual gas analysis (RGA), optical emission spectroscopy (OES) and end point detection are discussed. Characterization techniques such as scanning electron microscopy x-ray photoelectron spectroscopy, atomic probe methods advanced optical microscopy, optical thin film measurements, ellipsometry, and resistivity/conductivity measurements are introduced and tied to process control. Basic measurements for yield analysis and process control are also stressed. These include breakdown measurements, junction testing, and capacitance-voltage and current voltage characterization. In addition, the characteristics of some simple bio-chip structures and MEMs devices are obtained and discussed. The student learns about the manufacturing issues involved in interconnects, materials compatibility and final device assembly. Aluminum, refractory metals and plastic fabrication techniques and characterization are discussed in detail along with topics such as diffusion barriers, contact resistance, electro migration, corrosion, and adhesion. The importance of planarization techniques such as deposition/etchback and chemical/mechanical polishing are emphasized. Lastly, procedures such as die separation, bonding, and sealing and final test for both conventional Cs and MEMs and biomedical devices are examined.
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1.00 - 12.00 Credits
Supervised placement and research in selected public and private agencies.
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3.00 Credits
In this introductory course in quantum mechanics, the foundations and origins will be covered. Other topics will include wave packets, the uncertainty principle, the Schroedinger equation, operator formalism, eigen functions, spherically symmetric systems, angular momentum, spin and scattering theory.
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1.00 - 3.00 Credits
Investigation of the theoretical or experimental area following a plan or proposal initiated by the student and approved by the major advisor. Independent Study courses give students the opportunity to pursue research and/or studies that are not part of the university's traditional course offerings. Students work one on one or in small groups with faculty guidance and are typically required to submit a final paper or project as determined by the supervising professor.
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1.00 - 6.00 Credits
A workshop is a program which is usually of short duration, narrow in scope, often non-traditional in content and format, and on a timely topic.
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1.00 - 3.00 Credits
A Selected Topics course is a normal, departmental offering which is directly related to the discipline, but because of its specialized nature, may not be able to be offered on a yearly basis by the department.
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3.00 Credits
Foundations of Academic Discovery serves as the entry point to the Rock Integrated Studies Program. With its strong faculty-student interaction, the course promotes intellectual inquiry, critical and creative thinking, and computer skills needed for academic success. Through varied content, the course introduces students to academic discourse and information literacy while exploring topics such as diversity and inclusion and global awareness. This course will set students along the path to becoming engaged with issues and scholarship important to a 21st century education while they learn about themselves and their place in the world.
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1.00 - 3.00 Credits
A unique and specifically focused course within the general purview of a department which intends to offer it on a "one time only" basis and not as a permanent part of the department's curriculum.
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