ME 6580 - Fund Micro/Nano Fabrication

Institution:

Clemson University

Subject:

Mechanical Engineering

Description:

Fundamental principles behind micro and nano manufacturing processes used in MEMS, bioMEMS and related fields. Overviews cleanroom environments and materials used in the field. Details the physical and chemical aspects of photolithography, next generation lithography dry and wet etching, and physical and chemical vapor deposition. Includes a lab section to reinforce knowledge acquired during lectures.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.clemson.edu

Phone Number:

(864) 656-4636

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

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