ENGR 403 - INTRO TO MEMS

Institution:

Delaware State University

Subject:

Pre-engineering

Description:

Introduction of MEMS terminology, review of silicon processing techniques, bulk and surface micromachining techniques, materials used for MEMS processes and their properties, basic sensing mechanisms used in MEMS processes, study of basic MEMS based sensors, thermal micro sensors, radiation micro sensors, biochemical micro sensors, mechanical micro sensors, micro actuators, introduction to MEMS device packaging.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.desu.edu

Phone Number:

(302) 857-6060

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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