ECE 4370 - Microelectromechanical Systems

Institution:

Clemson University

Subject:

Electrical and Comp Engr

Description:

Introduction to the basic materials in current microelectromechanical systems (MEMS), as well as the fundamental sensing and actuation mechanisms therein. Students also learn the basic fabrication techniques for bulk and surface micromachining, discuss the primary forces in MEMS devices, and study the basic micro mechanical structures and microfluidics. Preq: CH 1020 and PHYS 1220; and senior status.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.clemson.edu

Phone Number:

(864) 656-4636

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

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