BENG 5700 - Introduction to Microfabrication

Institution:

Utah State University

Subject:

Biological Engineering

Description:

This course covers materials, wet chemical cleaning and etch, photolithography, metal deposition, doping, carrier density and conductivity, microfluidics, and micro-electronic-mechanical-systems. Prerequisite/Restriction: PHYS 2210 or PHYS 2310 PHYS 2215 PHYS 2220 or PHYS 2320 PHYS 2225 Admission to Professional Engineering Program Permission of instructor Cross-listed as: ECE 5700, MAE 5700, PHYS 5700

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.usu.edu

Phone Number:

(435) 797-1000

Regional Accreditation:

Northwest Commission on Colleges and Universities

Calendar System:

Semester

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