NMT 216 - Characterization, Packaging & Testing of Nanofabricated Structures

Institution:

Luzerne County Community College

Subject:

Nanofabrication Manufacturing Tech - Science Track

Description:

This course examines a variety of measurements and techniques essential for device fabrication. Monitoring techniques such as residual gas analysis (RGA), optical emission spectroscopy (OES) and end point detection will be discussed. Characterization techniques such as SEM, XPS/Auger, surface profilometry, advanced optical microscopy, optical thin film measurements, ellipsometry, and resistivity/conductivity measurements will be used on real samples. Basic electrical measurements on device structures for yield analysis and process control will also be stressed. These will include breakdown measurements, junction testing, and C-V and I-V tests.

Credits:

3.00

Credit Hours:

Prerequisites:

CHE 151, GET 251 or GET 252

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture/Lab

Notes:

Additional Information:

Historical Version(s):

09/01/2006 - 01/03/2013 

Institution Website:

www.luzerne.edu

Phone Number:

(570) 740-0200

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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