NMT 215 - Materials Modification Nanofabrication

Institution:

Luzerne County Community College

Subject:

Nanofabrication Manufacturing Tech - Science Track

Description:

In this course the student will learn about the manufacturing issues involved in metal interconnects, dielectrics and final device assembly. Aluminum, refractory metals and copper deposition techniques and characterization will be discussed in detail along with topics such as diffusion barriers, contact resistance, electromigration, corrosion, and adhesion. The importance of planarization techniques such as deposition/etchback and chemical/mechanical polishing will be emphasized. Lastly, packaging procedures such as die separation, inspection bonding, sealing and final test will be examined.

Credits:

3.00

Credit Hours:

Prerequisites:

CHE 151, GET 251 or GET 252

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture/Lab

Notes:

Additional Information:

Historical Version(s):

09/01/2006 - 01/03/2013 

Institution Website:

www.luzerne.edu

Phone Number:

(570) 740-0200

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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