NMT 213 - Thin Films in Nanofabrication

Institution:

Luzerne County Community College

Subject:

Nanofabrication Manufacturing Tech - Science Track

Description:

The basics of thin films including growth, structure, mechanical properties, electrical properties, deposition equipment will be examined in the first part of this course. This will include atmospheric, low pressure, and plasma enhanced chemical vapor deposition and sputtering, thermal evaporation, and beam evaporation physical vapor deposition. Materials to be considered will include dielectrics (nitride, oxide), polysilicon (doped and undoped), and metals (aluminum, tungsten, copper, adhesion promoters, diffusion barriers) The second part of the course will focus on etching processes and will emphasize reactive ion etching (single water, batch), high-ion-density reactors (TCP, helicon, ECR, MERIE) and ion beam etching. Student will receive hands-on experience in depositing and etching dielectric, semiconductor, and metal materials using state-of-the-art tools.

Credits:

3.00

Credit Hours:

Prerequisites:

CHE 151, GET 251 or GET 252

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture/Lab

Notes:

Additional Information:

Historical Version(s):

09/01/2006 - 01/03/2013 

Institution Website:

www.luzerne.edu

Phone Number:

(570) 740-0200

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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