NMT 211 - Safety & Equipment Overview for Nanofabrication

Institution:

Luzerne County Community College

Subject:

Nanofabrication Manufacturing Tech - Science Track

Description:

This course will provide an overview of basic semiconductor industry processing equipment and materials handling procedures with a focus on maintenance, safety, environment, and health issues. Topics to be covered will include: cleanroom maintenance, safety, and health issues, vacuum pumping maintenance, environmental, safety, and health issues (covering direct drive mechanical, Rootes blowers, turbomolcular, and dry mechanical systems); furnace maintenance, safety, environmental, and health issues (covering horizontal, vertical, rapid thermal annealing tools); chemical vapor deposition system maintenance, safety, environmental, and health issues (covering gas delivery, corrosive and flammable gas storage and plumbing, regulators, and mass flow controllers); and vacuum deposition/ etching system maintenance, safety, environment, and health issues (covering microwave and RF power supplies and tuners, heating and cooling units, vacuum gauges, valves, and, process controllers). Specific materials handling issues will include DI water, solvents, cleansers, ion implantation and diffusion sources, photoresists and developers, metals, dielectrics, toxic, flammable, corrosive, and highpurity gases, and packaging materials.

Credits:

3.00

Credit Hours:

Prerequisites:

CHE 151, GET 251 or GET 252

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture/Lab

Notes:

Additional Information:

Historical Version(s):

09/01/2006 - 01/03/2013 

Institution Website:

www.luzerne.edu

Phone Number:

(570) 740-0200

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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