2 374J - Design and Fabrication of Microelectromechanical Systems

Institution:

Massachusetts Institute of Technology

Subject:

Description:

Provides an introduction to microsystem design. Covers material properties, microfabrication technologies, structural behavior, sensing methods, electromechanical actuation, thermal actuation and control, multi-domain modeling, noise, and microsystem packaging. Applies microsystem modeling, and manufacturing principles to the design and analysis a variety of microscale sensors and actuators (e.g., optical MEMS, bioMEMS, and inertial sensors). Emphasizes modeling and simulation in the design process. Students taking the graduate version complete additional assignments.

Credits:

3.00

Credit Hours:

Prerequisites:

Prereq: 6.003 or 2.003, Physics II (GIR); or permission of instructor

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

web.mit.edu/student/

Phone Number:

(617) 253-1000

Regional Accreditation:

New England Association of Schools and Colleges

Calendar System:

Four-one-four plan

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