ECE 583 - Semiconductor Nanotech Lab

Institution:

University of Illinois at Urbana-Champaign

Subject:

Description:

Practical aspects of design and testing of nanometer-scale, MOS circuit technology. Emphasis on process integration and the interrelationship between the process flow and device/circuit performance. Experience with state-of-the-art, process and device simulation tools; nanostructure characterization using atomic force and transmission electron microscopies; capacitance, conductance and scattering parameter measurements used to extract parameters for circuit models. Prerequisite: ECE 444; PHYS 485 or PHYS 486.

Credits:

4.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.illinois.edu/

Phone Number:

(217) 333-1000

Regional Accreditation:

North Central Association of Colleges and Schools

Calendar System:

Semester

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