ECE 485 - MEMS Devices & Systems

Institution:

University of Illinois at Urbana-Champaign

Subject:

Description:

Introduction to principles, fabrication techniques, and applications of microelectromechanical systems (MEMS). In-depth analysis of sensors, actuator principles, and integrated microfabrication techniques for MEMS. Comprehensive investigation of state-of-the-art MEMS devices and systems. Same as IE 485 and ME 485. For engineering majors with senior standing.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.illinois.edu/

Phone Number:

(217) 333-1000

Regional Accreditation:

North Central Association of Colleges and Schools

Calendar System:

Semester

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