CHBE 457 - Microelectronics Processing

Institution:

University of Illinois at Urbana-Champaign

Subject:

Description:

Introductory survey of chemical processing principles applied to microelectronic fabrication. Key concepts originate from chemical kinetics; thermodynamics; mass and energy balances; transport of mass, momentum and heat; and process synthesis and integration. Prerequisite: Junior or senior standing in Chemical and Biomolecular Engineering, Electrical and Computer Engineering, or Materials Science and Computer Engineering.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.illinois.edu/

Phone Number:

(217) 333-1000

Regional Accreditation:

North Central Association of Colleges and Schools

Calendar System:

Semester

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