CHBE 284 - Semiconductor Materials Processing

Institution:

Vanderbilt University

Subject:

Description:

Introduction to the materials processing unit operations of silicon device manufacturing. Topics include basic semiconductor physics and device theory, production of substrates, dopant diffusion, ion implantation, thermal oxidation and deposition processes, plasma deposition processes, photolithography, wet chemical and plasma etching, and analytical techniques. FALL.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.vanderbilt.edu

Phone Number:

(615) 322-7311

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

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