ECHE 383 - Chemical Engineering Applied to Microfabrication and Devices

Institution:

Case Western Reserve University

Subject:

Description:

Silicon based microfabrication and micromachining require many chemical engineering technologies. Microfabricated devices such as sensors are also directly related to chemical engineering. The applications of chemical engineering principles to microfabrication and micromachining are introduced. Oxidation processing, chemical vapor deposition, etching and patterning techniques, electroplating and other technologies are discussed. Graduate students will submit an additional final project on some technical aspect of microfabrication technology or devices. Recommended preparation: ECHE 363 and ECHE 371. Offered as ECHE 383 and ECHE 483.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.case.edu

Phone Number:

(216) 368-2000

Regional Accreditation:

North Central Association of Colleges and Schools

Calendar System:

Semester

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