ME 141B - MEMS: Processing and Device Characterization

Institution:

University of California-Santa Barbara

Subject:

Mechanical Engineering

Description:

Lectures and laboratory on semiconductor-based processing for MEMS. Description of key equipment and characterization tools used for MEMS and design, fabrication, characterization and testing of MEMS. Emphasis on current MEMS devices including accelerometers, comb drives, micro-reactors and capacitor-actuators.

Credits:

4.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.ucsb.edu

Phone Number:

(805) 893-8000

Regional Accreditation:

Western Association of Schools and Colleges

Calendar System:

Quarter

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