CHEN 675 - Microelectron Proc Engr

Institution:

Texas A & M University-Galveston

Subject:

CHEN - Chemical Engineering

Description:

Microelectronics Process Engineering. (3-0). Credit 3. State-of-art process engineering principles on microelectronics, especially for the fabrication of very large scale integrated circuits (VLSICs); fundamental unit processes, such as thin film deposition, thermal growth, lithography, etching and doping, material structures and properties, and basic device operation principles. Prerequisites: CHEN 623 and 624 or approval of instructor.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.tamug.edu

Phone Number:

(409) 740-4414

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

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