MTSE 5520 - Physical and Chemical Basis of Integrated Circuit Fabrication

Institution:

University of North Texas

Subject:

Materials Science&Engineering

Description:

5520. Physical and Chemical Basis of Integrated Circuit Fabrication. 3 hours. Current requirements and future trends in processing technology for very large scale integrated circuits and related application. Wafer fabrication, lithography, oxidation, diffusion, ion implantation, film deposition, wet and dry etching, multilevel metal interconnect, process integration and process simulation. Prerequisite(s): MTSC 5500 or consent of department.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.unt.edu

Phone Number:

(940) 565-2000

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

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