PH 545 - Microelectronic Device Fabrication I

Institution:

Portland State University

Subject:

Physics

Description:

The principles of crystal growth and wafer preparation, ion implantation, doping and diffusion, and oxidation, including crystal structure, defects, heterogeneous chemical reactions, thermodynamics and kinetics of basic processes such as diffusion. Realistic process flows, physical metrology, device structure, electrical behavior and their trade-offs are discussed.

Credits:

4.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.pdx.edu

Phone Number:

(503) 725-3511

Regional Accreditation:

Northwest Commission on Colleges and Universities

Calendar System:

Quarter

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