ENG-SCI 176 - Introduction to MicroElectroMechanical System

Institution:

Harvard University

Subject:

Description:

This course introduces student to the rapidly emerging, multi-disciplinary and exciting field of MicroElectroMechanical Systems ( MEMS). It teaches fundamentals of micro machining and Micro fabrication techniques, including planar thin-film process technologies, photolithography and soft-lithography techniques, deposition and etching techniques, and surface, bulk, and electroplating micro machining technologies.

Credits:

4.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.harvard.edu

Phone Number:

(617) 495-1000

Regional Accreditation:

New England Association of Schools and Colleges

Calendar System:

Semester

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