ECE 212 - Introduction to Micro-Electromechanical Systems (MEMS)

Institution:

Duke University

Subject:

Electrical & Computer Egr

Description:

Design, simulation, fabrication, and characterization of micro-electromechanical systems (MEMS) devices. Integration of non-conventional devices into functional systems. Principles of fabrication, mechanics in micrometer scale, transducers and actuators, and issues in system design and integration. Topics presented in the context of example systems. Lab covers design, simulation, and realization of MEMS devices using commercially available foundry process. Prerequisite: ECE 51L or ME 125L or equivalent. Instructor: Kim.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

WWW.DUKE.EDU

Phone Number:

(919) 684-8111

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

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