EE 67027 - Microfabrication Beam Technology

Institution:

University of Notre Dame

Subject:

Electrical Engineering

Description:

This course will provide the students with a solid background in electron beams, particularly scanning electron microscopy, and use that to address electron beam lithography technology. An introduction to vacuum systems will be provided. Other topis include focused ion beams and scanning probe techniques.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.nd.edu

Phone Number:

(574) 631-5000

Regional Accreditation:

North Central Association of Colleges and Schools

Calendar System:

Semester

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