EE 60598 - Semiconductor Microlithography

Institution:

University of Notre Dame

Subject:

Electrical Engineering

Description:

Lithography is the patterning technique used in the fabrication of semiconductor integrated circuits. Advances in lithography over the last two decades have fueled the explosive growth of the microelectronics industry. In fact, future advances in microelectronics are being gated by advances in lithography. This course will cover the basic theory and technology of today's state-of-the-art in semiconductor lithography.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.nd.edu

Phone Number:

(574) 631-5000

Regional Accreditation:

North Central Association of Colleges and Schools

Calendar System:

Semester

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