MEAM 564 - The Principles and Practice of Microfabrication Technology

Institution:

University of Pennsylvania

Subject:

Description:

Prerequisite(s): Any of the following courses: ESE 218, MSE 321, MEAM 333, CHE 351, CHEM 321/322, Phys 250 or permission of the instructor. A laboratory course on fabricating microelectronic and micromechanical devices using photolithographic processing and related fabrication technologies. Lectures discuss: clean room procedures, microelectronic and microstructural materials, photolithography, diffusion, oxidation, materials deposition, etching and plasma processes. Basic laboratory processes are covered in the first two thirds of the course with students completing structures appropriate to their major in the final third. Students registering for ESE 574 will be expected to do extra work (including term paper and additional project).

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.upenn.edu

Phone Number:

(215) 898-5000

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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