MEAM 529 - rf Mems

Institution:

University of Pennsylvania

Subject:

Description:

Introduction to RM MEMS technologies; need for RF MEMS components in wireless communications. Review of micromachining techniques and MEMS fabrication approaches. Actuation methods in MEMS, TRF MEMS design and modeling. Examples of RF MEMS components from industry and academia. Case studies: micro-switches, tunable capacitors, inductors, resonators, filters, oscillators and micromachined antennas. Overview of RF NEMS.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.upenn.edu

Phone Number:

(215) 898-5000

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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