MEAM 550 - Micro-Electro-Mechanical Systems

Institution:

University of Pennsylvania

Subject:

Description:

Prerequisite(s): MEAM 527 or equivalent is recommended. Undergraduates need permission. Introduction to Micro-Electro-Mechanical Systems (MEMS). A brief overview of micromachining. Modeling strategies and algorithms for multi-energy domain coupled governing equations of MEMS components, devices, and systems. Component-level and system-level dynamics. Design case studies covering a wide range of transducers including mechanical, electrostatic, thermal, magnetic, optical, etc. Synthesis methods for MEMS. Review of selected recent papers from the literature. A term-project or a term-paper on a selected topic is required.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.upenn.edu

Phone Number:

(215) 898-5000

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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