ELE 438 - Thin Film Engineering

Institution:

Northern Illinois University

Subject:

Description:

Lecture/laboratory course designed to demonstrate theory and principles of thin film processing including vacuum processing and deposition techniques. Topics include resistive evaporation, DC sputtering, RF sputtering, ion beam sputtering, electron beam evaporation, methods of achieving vacuum, and measurement techniques. Prerequisites & Notes PRQ: ELE 335. Credits: 3

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.niu.edu

Phone Number:

(800) 892-3050

Regional Accreditation:

North Central Association of Colleges and Schools

Calendar System:

Semester

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