EE 415 - Microelectromechanical Systems

Institution:

University at Buffalo

Subject:

Description:

Credits: 3 Prerequisites: None Corequisites: None Type: LEC Intended for first-year graduate students. Silicon-based integrated MEMS promise reliable performance, miniaturization and low-cost production of sensors and actuator systems with broad applications in data storage, biomedical systems, inertial navigation, micromanipulation, optical display and microfluid jet systems. The course covers such subjects as materials properties, fabrication techniques, basic structure mechanics, sensing and actuation principles, circuit and system issues, packaging, calibration, and testing.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.buffalo.edu

Phone Number:

(716) 645-2000

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

The Course Profile information is provided and updated by third parties including the respective institutions. While the institutions are able to update their information at any time, the information is not independently validated, and no party associated with this website can accept responsibility for its accuracy.