MS 534 - Materials Technology for MicroelectronicsPrereq

Institution:

Boston University

Subject:

Description:

graduate standing or consent of instructor. This course deals with the materials issues in microelectronics processing. Fundamental materials science concepts of bonding, electronic structure, crystal structure, defects, and phase diagrams are applied to key processing steps in microelectronics technology. Also included are single crystal growth, lithography, thermal oxidation of Si, dopant diffusion, ion implantation, thin film deposition, etching and back-end processing; as well as widely used microelectronics simulation software such as SUPREM. Materials challenges in emerging direction in micro- and nanoelectronics, including silicon on insulator technology, Si-Ge strained layers, and quantum dots will also be addressed. 4 cr.

Credits:

4.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.bu.edu

Phone Number:

(617) 353-2000

Regional Accreditation:

New England Association of Schools and Colleges

Calendar System:

Semester

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