ENG ME 555 - MEMS:Fabrication and MaterialsPrereq

Institution:

Boston University

Subject:

Description:

graduate status or consent of the instructor. This course will explore the world of microelectromechanical devices and systems (MEMS). This requires an awareness of design, fabrication, and material issues involved in MEMS. We will go over this through a combination of lectures, case studies, and individual homework assignments. The course will cover design, fabrication technologies, material properties, structural mechanics, basic sensing and actuation principles, packaging, and MEMS markets and applications. The course will emphasize MEMS fabrication and materials. This is not because the other parts aren't important. Instead, it is because with MEMS fabrication and materials expertise there is something concrete students can do that will always help. When we examine the special topics and case studies, a lot of these other pieces will be put together. 4 cr.

Credits:

4.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.bu.edu

Phone Number:

(617) 353-2000

Regional Accreditation:

New England Association of Schools and Colleges

Calendar System:

Semester

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