0305-525 - Optics for Microelectronic Engineering

Institution:

Rochester Institute of Technology

Subject:

Description:

An introduction to the principles of optics in which refl ection, refraction and transmission are explained as a result of interference between the excitation fi eld and the atomic oscillations that result in the emission of spherical wavelets (Huygens Principle). Topics include Fresnel Coeffi cients, imagery due to refraction at a single surface, simple lenses, ray tracing techniques, apertures, mirrors and thick lenses. Both the paraxial case (ideal imagery) and aberrations in spherical lenses are covered. An introduction to physical optics and the topics of diffraction and interferometry is provided. These topics set the stage for understanding ellipsometers, steppers, microscopes, and other optical instrumentation utilized in IC manufacturing. Lab required. (1017-313) Class 3, Lab 3, Credit 4 (F, W)

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.rit.edu/

Phone Number:

(585) 475-2411

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Quarter

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