0305-676 - Microlithography Materials and Processes Lab

Institution:

Rochester Institute of Technology

Subject:

Description:

Laboratory will be taken concurrently with 0305-666. Materials characterizations and process optimizations will utilize experimental design techniques. Processes to be studied include development rate monitoring. DUV resists, BARC, resist silylation and SEM evaluation of imaged resists and etched structures. Class 0, Lab 3, Credit 1 (F, W)

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.rit.edu/

Phone Number:

(585) 475-2411

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Quarter

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