0305-221 - Introduction to Micro/Nanolithography

Institution:

Rochester Institute of Technology

Subject:

Description:

An introduction to the fundamentals of micro/nanolithography. Topics include IC masking, sensitometry, radiometry, resolution, contact lithography, projection lithography, photoresist materials and processing. Laboratories include mask making, source characterization, resist characterization, and stepper operation. (1011-208) Class 3, Lab 3, Credit 4 (S)

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.rit.edu/

Phone Number:

(585) 475-2411

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Quarter

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