0304-220 - Fundamentals of Micromachining I

Institution:

Rochester Institute of Technology

Subject:

Description:

A hands-on laboratory course designed to give students an introduction to clean room operations and micromachining technologies. Students will fabricate a variety of simple microscopic devices and investigate their mechanical behavior. Topics covered include clean rooms, optical lithography, thin fi lm materials, chemical and plasma etching, and metrology. (This class is not intended for the microelectronics major or minor). Lab 2, Credit 1

Credits:

2.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.rit.edu/

Phone Number:

(585) 475-2411

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Quarter

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