0301-686 - MEMS Design

Institution:

Rochester Institute of Technology

Subject:

Description:

Microelectromechanical systems (MEMS) are widely used in aerospace, automotive, biotechnology, instrumentation, robotics, manufacturing, and other applications. There is a critical need to synthesize and design high performance MEMS which satisfy the requirements and specifi cations imposed. Integrated approaches must be applied to design and optimized MEMS, which integrate microelectromechanical motion devices, ICs, and microsensors. This course covers synthesis, design, modeling, simulation, analysis, control and fabrication of MEMS. Synthesis, design and analysis of MEMS will be covered including CAD. (Fourth- or fi fth-year standing for undergraduates, or graduate standing) Class 4, Credit 4

Credits:

4.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.rit.edu/

Phone Number:

(585) 475-2411

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Quarter

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