ECE 4234 - Semiconductor Processing

Institution:

Virginia Polytechnic Institute and State University

Subject:

Description:

Manufacturing practices used in silicon integrated circuit fabrication and the underlying scientific basis for these process technologies. Physical models are developed to explain basic fabrication steps, such as substrate growth, thermal oxidation, dopant diffusion, ion implantation, thin film deposition, etching, and lithography. The overall CMOS integrated circuit process flow is described within the context of these physical models. Pre: 2204 or 3054. (3H,3 Credits). I.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

WWW.VT.EDU

Phone Number:

(540) 231-6000

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

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