CH E538 /438 - Microelectronic Processing

Institution:

California State University-Los Angeles

Subject:

Description:

Prerequisite: E E 210 or PHYS 152. Basic principles of device physics and applications of transport processes to device fabrication. Fabrication processes include oxidation, microlithography, etching, doping by diffusion or ion implantation, film growth by chemical vapor deposition, and metallization. Graduate students have additional assignments on design of micro-fabricated devices. (Lecture-problems 3 hours) Letter grade only (A-F).

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.calstatela.edu

Phone Number:

(323) 343-3000

Regional Accreditation:

Western Association of Schools and Colleges

Calendar System:

Quarter

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