ECSE 6240 - VLSI Fabrication Technology

Institution:

Roberts Wesleyan University

Subject:

Description:

Fabrication technology for silicon and gallium arsenide integrated circuits with emphasis on sub-micron structures. Topics include epitaxy, diffusion, binary and ternary phase diagrams, grown and deposited oxides and nitrides, polysilicon and silicide technology, single-and multi-metal systems, plasma and chemical etching, ion milling photo, e-beam and X-ray lithography. Prerequisites/Corequisites: Prerequisite: ECSE 4250 or equivalent. When Offered: Spring term even-numbered years. Credit Hours: 3

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

WWW.Roberts.edu

Phone Number:

(585) 594-6000

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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