MTLE 6300 - Integrated Circuit Fabrication Laboratory

Institution:

Rensselaer Polytechnic Institute

Subject:

Description:

Theory and practice of IC fabrication in a research laboratory environment. Test chips are fabricated and the resulting devices and circuits evaluated. Processes and fabrication equipment studied and used include oxidation/diffusion, CVD reactors, photolithography, plasma etching, vacuum evaporator, ion implantation, etc. Instruments used in process monitoring and final testing include thin film profilometer, ellipsometer, resistivity probe, scanning electron microscope, capacitance-voltage system, etc. The fundamentals of hazardous material handling and clean room procedures are studied. Prerequisites/Corequisites: Prerequisite: ECSE 4250 or equivalent. When Offered: Spring term annually . Cross Listed: Cross-listed as ECSE 6300. Students cannot obtain credit for both this course and ECSE 6300. Credit Hours: 3

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.rpi.edu

Phone Number:

(518) 276-6000

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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