CHEE 537 - Advanced Topics in Microelectronics Manufacturing

Institution:

University of Arizona

Subject:

Description:

Description: Fundamental material, electrical, and chemical properties of solid metal, semiconductor, insulator, and organic surfaces applied to selected gas/solid surface chemical reactions important in semiconductor processing and heterogeneous catalysis. This course is designed to introduce students to the chemistry and physics of solid surfaces and interfaces with an emphasis on the gas/solid interface. The first half of the course will be devoted to learning the fundamental material, electrical, and chemical properties of solid surfaces. The fundamentals will be applied in the second half of the course to topics in chemical catalysis and integrated circuit manufacture. Graduate-level requirements include completion of two projects of their choice with the approval of the instructor. Grading: Regular grades are awarded for this course: A B C D E. Identical to: CHEM 537, MSE 537. May be convened with: CHEE 437. Usually offered: Spring.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.arizona.edu

Phone Number:

(520) 621-2211

Regional Accreditation:

North Central Association of Colleges and Schools

Calendar System:

Semester

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