EE 451L - Integrated Circuit Fabrication Laboratory

Institution:

Alabama A & M University

Subject:

Description:

1 hr. This laboratory course provides a hand-on clean room experience fabricating an integrated circuit (IC) chip. Silicon-based semiconductor technology and standard IC microfabrication processes for the fabrication of the microchip will be implemented through the course. Specific clean room fabrication processes and techniques used in the class include basic clean room skills, mask layout and fabrication, UV lithography, wet and dry oxidation, wet and dry etching, thermal diffusion, metallization, packaging, and device characterization. The students will fabricate a device wafer and characterize the electrical properties of the fabricated devices and circuits on the wafer. Corequisite: EE 451

Credits:

1.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.aamu.edu/

Phone Number:

(256) 372-5000

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

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