CPEG 420 - Nanotechnology Fabrication Principles Odd

Institution:

Virginia State University

Subject:

Description:

Introduction to semiconductor fabrication principles and technology, including crystal growth, oxidation, diffusion, ion implantation, photolithography, chemical vapor deposition, physical vapor deposition, plasma reactive ion etching, chemical mechanical polishing and other nanotechnology manufacturing techniques.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.vsu.edu

Phone Number:

(804) 524-5000

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

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