EGRE 436 - Advanced Semiconductor Fabrication

Institution:

Virginia Commonwealth University

Subject:

Description:

Semester course; 3 lecture and 3 laboratory hours. 4 credits. Prerequisite: EGRE 435 or consent of instructor. This course covers process integration into functional modules such as trench or LOCOS isolation, retrograde well formation, shallow junction formation, channel engineering, advanced gate structures and multilevel metal interconnects. This course covers low-pressure chemical vapor deposition, silicide formation, plasma etching of thin films and chemical mechanical polishing. A polysilicon gate CMOS process is used as the basis for studying many of the topics covered in lecture. Electrical characterization of devices and circuits also are included in the lab work.

Credits:

4.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Multiple

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.vcu.edu/

Phone Number:

(804) 828-0100

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

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