EGRE 435 - Semiconductor Processes

Institution:

Virginia Commonwealth University

Subject:

Description:

Semester course; 3 lecture and 3 laboratory hours. 4 credits. Prerequisites: EGRE 303 and ENGR 334 or the consent of the instructor. This course presents a detailed analysis of the physics and modeling of the basic processes used in semiconductor processing. Emphasis is placed on the non-ideal effects that cause realistic processes to deviate from first order models, including second order effects such as interactions on the atomic level and the influence of crystal defects. After developing a theoretical understanding, a higher order physical modeling approach is derived. These models are implemented and explored in the laboratory section of the course using computer simulation and are used as a basis for designing a realistic semiconductor device process. Circuit layout software is used in the laboratory portion of the course to design a test chip specifically for the lab device process. This device and process design accomplishes the design phase of the senior design project, which is then completed in EGRE 436.

Credits:

4.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Multiple

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.vcu.edu/

Phone Number:

(804) 828-0100

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

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