Mat E432 - Microelectronics Fabrication Techniques

Institution:

Iowa State University

Subject:

Description:

(Cross-listed with E E). (2-4) Cr. 4. Prereq : Phys 222, Math 267. EE 332 or Mat E 331 recommended. Techniques used in modern integrated circuit fabrication, including diffusion, oxidation, ion implantation, lithography, evaporation, sputtering, chemicalvapor deposition, and etching. Process integration. Process evaluation and fi nal device testing. Extensive laboratory exercises utilizing fabrication methods to build electronic devices. Use of computer simulation tools for predicting processing outcomes. Recent advances in processing CMOS, ICs and micro-mechanical systems (MEMS). Nonmajor graduate credit.

Credits:

2.00 - 4.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.iastate.edu

Phone Number:

(515) 294-5836

Regional Accreditation:

North Central Association of Colleges and Schools

Calendar System:

Semester

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