SYEN 4182 - MEMS and Microsystems Laboratory

Institution:

University of Arkansas at Little Rock

Subject:

Description:

Prerequisites: SYEN 4376 and 4176 or consent of instructor. This laboratory course is an introduction to the principles of microfabrication for microelectronic devices, sensors, and micromechanical structures, MEMS, and microsystems with applications in engineering. Course comprised of laboratory work and accompanying lectures that cover silicon oxidation, photolithography, thin film deposition, ethcing, electrochemical deposition (plating) and packaging. Some selected topics in yield and reliability, as well as process simulation may be covered. Dual-listed in the UALR Graduate Catalog as SYEN 5182. Two hours lab. One credit hour.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

ualr.edu/www/

Phone Number:

(501) 569-3000

Regional Accreditation:

North Central Association of Colleges and Schools

Calendar System:

Semester

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