ECE 440 - Intro to Integrated Circuit And Mems Processing

Institution:

Boise State University

Subject:

Description:

Fundamentals of integrated circuit and micro-electromechanical systems (MEMS) fabrication technology; semiconductor substrates; theory of unit processes such as diffusion, oxidation, ion implantation, rapid thermal processing, photolithography, wet etching and cleaning, dry etching, thin-film deposition; chemical mechanical polishing; process integration; metrology; statistical process control; TCAD. PREREQ: ECE 323 or PERM/INST. COREQ: ECE 440L.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.boisestate.edu

Phone Number:

(208) 426-1011

Regional Accreditation:

Northwest Commission on Colleges and Universities

Calendar System:

Semester

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