Chemical Engineering 104C - Semiconductor Processing

Institution:

University of California-Los Angeles

Subject:

Description:

Lecture, four hours; outside study, six hours. Requisite: course 101C. Corequisite: course 104CL. Basic engineering principles of semiconductor unit operations, including fabrication and characterization of semiconductor devices. Investigation of processing steps used to make CMOS devices, including wafer cleaning, oxidation, diffusion, lithography, chemical vapor deposition, plasma etching, metallization, and statistical design of experiments and error analysis. Presentation of student results in both written and oral form. Letter grading.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.ucla.edu/

Phone Number:

(310) 825-4321

Regional Accreditation:

Western Association of Schools and Colleges

Calendar System:

Quarter

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