PHYS 423 - Thin Films in Nanofabrication - NMT 313

Institution:

Slippery Rock University of Pennsylvania

Subject:

Physics

Description:

This course covers thin film deposition and etching practices in nanofabrication. The deposition techniques addressed in the first part of the course include atmospheric, low pressure, and plasma enhanced chemical vapor deposition and sputtering, thermal evaporation, and beam evaporation physical vapor deposition. Also included are self-assembling molecule based techniques. Materials considered include organics, dielectrics (e.g., nitrides, oxides), polysilicon (doped and undoped), metals (e.g., aluminum, tungsten, copper), adhesion promoters and diffusion barriers. The second part of the course focuses on etching processes and emphasizes reactive ion etching (single wafer, batch), high-ion-density reactors, ion beam etching and wet chemical etching. Students receive hands-on experience in depositing and etching dielectric, semiconductor, and metal materials using state-of-the-art tools and experience practicing the steps critical to micro- and nanofabrication of structures used in a variety of fields from biotechnology and the biomedical fields to microelectronics.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Other

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.sru.edu

Phone Number:

(724) 738-9000

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

The Course Profile information is provided and updated by third parties including the respective institutions. While the institutions are able to update their information at any time, the information is not independently validated, and no party associated with this website can accept responsibility for its accuracy.