ELT 237 - Vacuum And Power rf Systems

Institution:

Pueblo Community College

Subject:

Description:

3 CR. (2L/1.5 LBV) PRQ: PHY 105, ELT 106. Covers vacuum systems and RF (radio frequency) energy sources in the manufacture of semiconductor devices. Includes gas laws and gas properties, vacuum pumps, gauges and valves, and leak detection techniques. Addresses plasma physics, RF generators, transmission lines, RF interference, and safety.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.pueblocc.edu

Phone Number:

(719) 549-3200

Regional Accreditation:

North Central Association of Colleges and Schools

Calendar System:

Semester

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